Challenges in the In-situ Deflectometric Measurement of Optical Surfaces

Xiangchao Zhang; Zhenqi Niu; Junqiang Ye; Shaliang Li; Wanliang Zhao

doi:10.1117/12.2573714

10 October 2020 Challenges in the In-situ Deflectometric Measurement of Optical Surfaces

Xiangchao Zhang, Zhenqi Niu, Junqiang Ye, Shaliang Li, Wanliang Zhao

Proceedings Volume 11552, Optical Metrology and Inspection for Industrial Applications VII; 115520C (2020) https://doi.org/10.1117/12.2573714
Event: SPIE/COS Photonics Asia, 2020, Online Only

Abstract

The phase measuring deflectometry is a powerful technique for the in-situ measurement of of complex optics. Its measurement accuracy is comparable with conventional interferometry, but with higher flexibility, stability and efficiency. The three main challenges in the deflectometric measurement, namely the position-angle uncertainty in calculating the pixel correspondences, height-slope ambiguity in specifying the normal vectors, and rank deficiency in surface reconstruction are analyzed. Some significant error factors and effective solutions are introduced. The measuring accuracy of complex surfaces can achieve a level of 100 nm RMS.

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Citation Download Citation

Xiangchao Zhang, Zhenqi Niu, Junqiang Ye, Shaliang Li, and Wanliang Zhao "Challenges in the In-situ Deflectometric Measurement of Optical Surfaces", Proc. SPIE 11552, Optical Metrology and Inspection for Industrial Applications VII, 115520C (10 October 2020); https://doi.org/10.1117/12.2573714

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