Methods improve micro multiple configurations

Hua Liu; Mingsuo Li; Ronggang Zhu; Liwei Zhou

doi:10.1117/12.2573652

10 October 2020 Methods improve micro multiple configurations

Hua Liu, Mingsuo Li, Ronggang Zhu, Liwei Zhou

Proceedings Volume 11552, Optical Metrology and Inspection for Industrial Applications VII; 115521B (2020) https://doi.org/10.1117/12.2573652
Event: SPIE/COS Photonics Asia, 2020, Online Only

Abstract

The theory of compound zoom system and its influence and control on aberration are the basis for the design of such systems and have practical value in engineering. The principle, modeling and error analysis are analyed. Based on the system configuration of the compound zoom system, moreover, this paper advances the algorithm analysis.

Citation Download Citation

Hua Liu, Mingsuo Li, Ronggang Zhu, and Liwei Zhou "Methods improve micro multiple configurations", Proc. SPIE 11552, Optical Metrology and Inspection for Industrial Applications VII, 115521B (10 October 2020); https://doi.org/10.1117/12.2573652

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