Measurement of interactive matrix and flat-surface calibration of OKO 109-channel deformable mirror using ZYGO-GPI interferometer

Xinyang Chen; Chaoyan Wang; Lixin Zheng; Jianqing Cai; Yuanyuan Ding

doi:10.1117/12.2575904

10 October 2020 Measurement of interactive matrix and flat-surface calibration of OKO 109-channel deformable mirror using ZYGO-GPI interferometer

Xinyang Chen, Chaoyan Wang, Lixin Zheng, Jianqing Cai, Yuanyuan Ding

Author Affiliations +

Proceedings Volume 11552, Optical Metrology and Inspection for Industrial Applications VII; 115521Y (2020) https://doi.org/10.1117/12.2575904
Event: SPIE/COS Photonics Asia, 2020, Online Only

Abstract

Deformable mirror (DM) is the most main wavefront corrector in adaptive optics, which can be used to compensate optical aberrations through changing the reflective mirror’s surface frequently. However, a commercial piezoelectric DM can’t have an ideal flat initial surface under zero-voltage condition due to limitation of thin mirror fabrication and support structure of actuators behind of mirror. Optical aberrations generated by this initial distortion will seriously attenuate the performance of DM’s close-loop control, so a flat-surface calibration of mirror needs to be carried out before DM properly correct optical aberrations. In order to properly control the optical figure of the DM we have to obtain an interactive matrix which is the response of optical surface to the DM actuator’s stroke. We measured a serious of surface phase data of OKO 109-channel DM through self-collimation using a ZYGO-GPI interferometer directly, then construct the interactive matrix by zonal and modal methods. After several close-loop iterations, the initial RMS surface error of OKO 109-channel deformable mirror, 1.506λ has been remarkably reduced to 0.145λ.

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Xinyang Chen, Chaoyan Wang, Lixin Zheng, Jianqing Cai, and Yuanyuan Ding "Measurement of interactive matrix and flat-surface calibration of OKO 109-channel deformable mirror using ZYGO-GPI interferometer", Proc. SPIE 11552, Optical Metrology and Inspection for Industrial Applications VII, 115521Y (10 October 2020); https://doi.org/10.1117/12.2575904

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