Presentation
10 October 2020 Mechanics-enabled extreme nanofabrication for ultrasmall plasmonic nanogaps
Yiqin Chen
Author Affiliations +
Abstract
This Conference Presentation, “Mechanics-enabled extreme nanofabrication for ultrasmall plasmonic nanogaps,” was recorded for the Photonics Asia 2020 Digital Forum.
Conference Presentation
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yiqin Chen "Mechanics-enabled extreme nanofabrication for ultrasmall plasmonic nanogaps", Proc. SPIE 11557, Plasmonics V, 115570L (10 October 2020); https://doi.org/10.1117/12.2575382
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KEYWORDS
Plasmonics

Nanofabrication

Optical lithography

Scanning probe lithography

Electron beam lithography

Lithography

Printing

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