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28 July 1989 Absolute Multilayer Characterization At High Spatial Resolution Via Real-Time Soft X-Ray Imaging
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Abstract
An imaging-based experimental technique is proposed for measuring the spatial distribution of the absolute soft x-ray characterization of a flat multilayered x-ray optic. The six components in this calibration technique are these: (1) a nearly monochromatic, point-like soft x-ray source, sufficiently bright; (2) the flat multilayered x-ray optic under test; (3) some position-sensitive soft x-ray photon-counting detector assembly; (4) vacuum chamber with theta-two theta drive, goniometers, stepper motors, etc; (5) a micro/mini computer with image-processing/frame-grabber board; (6) a bookeeping algorithm implemented in software to process the images being accumulated and to successively step the vacuum chamber to the next theta-two theta detent. At the Lawrence Livermore National Laboratory, position-sensitive detectors are the subject of experimental and theoretical studies for their suitability in novel, imaging-based technique anticipated to have substantially higher daily throughput ( wafers/day ) than is possible from the prevailing non-imaging facilities. A recent design, and the computaional model behind it, will be presented.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Charles J. Hailey and H. W. Siegmund "Absolute Multilayer Characterization At High Spatial Resolution Via Real-Time Soft X-Ray Imaging", Proc. SPIE 1160, X-Ray/EUV Optics for Astronomy and Microscopy, (28 July 1989); https://doi.org/10.1117/12.962647
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