AFM line space trench and depth measurement of fan-out fine-pitch high aspect ratio redistribution layer structure

Sung-Hua Zhong; Liang-Pin Chen

doi:10.1117/12.2583812

22 February 2021 AFM line space trench and depth measurement of fan-out fine-pitch high aspect ratio redistribution layer structure

Sung-Hua Zhong, Liang-Pin Chen

Author Affiliations +

Proceedings Volume 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV; 116112X (2021) https://doi.org/10.1117/12.2583812
Event: SPIE Advanced Lithography, 2021, Online Only

Conference Poster

Abstract

As the fan out advantage assembly packages of redistribution layer (RDL) line and space develop to more narrow to 2um / 2um, and with deeper structure. The accurate critical dimension (CD) and depth measurement are necessary to monitor process quality. There is the limit of resolution about 0.25um for traditional optical instrument, it is too large to measure narrow line and space in high accuracy. The non-contact wafer form atomic force microscope (AFM) is apply for this application with the high aspect ratio tip. This method has been used to measure isolate and dense RDL pattern includes copper etching and photoresist structure. The accuracy between AFM and focus ion beam (FIB) are less than 0.1um on top and bottom CD of redistribution layer.

Conference Presentation

Citation Download Citation

Sung-Hua Zhong and Liang-Pin Chen "AFM line space trench and depth measurement of fan-out fine-pitch high aspect ratio redistribution layer structure", Proc. SPIE 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV, 116112X (22 February 2021); https://doi.org/10.1117/12.2583812

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available