Application of RHEED in low vacuum environment

Tianqing Fan; Furong Qu; Jiaheng Feng; Yang Xia

doi:10.1117/12.2585204

4 December 2020 Application of RHEED in low vacuum environment

Tianqing Fan, Furong Qu, Jiaheng Feng, Yang Xia

Proceedings Volume 11617, International Conference on Optoelectronic and Microelectronic Technology and Application; 116171P (2020) https://doi.org/10.1117/12.2585204
Event: International Conference on Optoelectronic and Microelectronic Technology and Application, 2020, Nanjing, China

Abstract

Reflection High Energy Electron Diffraction (RHEED) is a common in-situ monitoring device for crystal thin films, which can monitor the thin films in the process of growth in real time and without damage. This paper reports the RHEED and difference system principle, RHEED in the development of low vacuum and its application in the atomic layer deposition (ALD).

Citation Download Citation

Tianqing Fan, Furong Qu, Jiaheng Feng, and Yang Xia "Application of RHEED in low vacuum environment", Proc. SPIE 11617, International Conference on Optoelectronic and Microelectronic Technology and Application, 116171P (4 December 2020); https://doi.org/10.1117/12.2585204

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