Development Of An Automatic Focusing Mechanism For An Interference Microscope

D. K. Cohen; E. R. Cochran; J. D. Ayres

doi:10.1117/12.962815

20 December 1989 Development Of An Automatic Focusing Mechanism For An Interference Microscope

D. K. Cohen, E. R. Cochran, J. D. Ayres

Proceedings Volume 1164, Surface Characterization and Testing II; (1989) https://doi.org/10.1117/12.962815
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

An autofocus system has been developed for an interference microscope. The basic design tradeoffs and current specifications are described

Citation Download Citation

D. K. Cohen, E. R. Cochran, and J. D. Ayres "Development Of An Automatic Focusing Mechanism For An Interference Microscope", Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); https://doi.org/10.1117/12.962815

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available