Image Formation In Common Path Differential Profilometers

M. G. Somekh; R. K. Appel

doi:10.1117/12.962812

20 December 1989 Image Formation In Common Path Differential Profilometers

M. G. Somekh, R. K. Appel

Proceedings Volume 1164, Surface Characterization and Testing II; (1989) https://doi.org/10.1117/12.962812
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

Several systems have recently been developed that apply various modulations onto the optical beams in order to both enhance the contrast from particular features and to reduce the effects of noise and microphonics. Consequently different imaging responses may be obtained at different photodetector output frequencies. This paper analyses a selection of AC profilometer systems by extending the analysis used for the conventional scanning optical microscope.

Citation Download Citation

M. G. Somekh and R. K. Appel "Image Formation In Common Path Differential Profilometers", Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); https://doi.org/10.1117/12.962812

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available