Measuring Surface Profiles With The Scanning Tunneling Microscope

V. Elings; J. Gurley

doi:10.1117/12.962814

20 December 1989 Measuring Surface Profiles With The Scanning Tunneling Microscope

V. Elings, J. Gurley

Proceedings Volume 1164, Surface Characterization and Testing II; (1989) https://doi.org/10.1117/12.962814
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

In the past two years scanning tunneling microscopy (STM) has expanded rapidly in several areas, over the size range from looking at atoms to looking at integrated circuits. In this paper we will cover some of the recent uses of STM and show some of the three-dimensional surface images which have now become routine.

Citation Download Citation

V. Elings and J. Gurley "Measuring Surface Profiles With The Scanning Tunneling Microscope", Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); https://doi.org/10.1117/12.962814

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