Surface Analysis For The Characterization Of Defects In Thin Film Processes

Ramin Lalezari; Robert G. Knollenberg

doi:10.1117/12.962826

20 December 1989 Surface Analysis For The Characterization Of Defects In Thin Film Processes

Ramin Lalezari, Robert G. Knollenberg

Proceedings Volume 1164, Surface Characterization and Testing II; (1989) https://doi.org/10.1117/12.962826
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

A surface analysis system commonly used in semiconductor processing is used to characterize microcontamination generated by optical thin film deposition processes. The system is first described and an overview presented of its operation and application when analyzing bare silicon wafers. Bare silicon wafers were used as witness plates to sample microcontamination generated by operations in ion beam sputtering and electron beam evaporation thin film processes. Additional wafers were used to test cleaning methods. The use of the surface analysis system was found to be invaluable in rapidly reducing point defects generated during processes, assessing the cleanliness of work environments, and providing feedback for developing cleaning processes.

Citation Download Citation

Ramin Lalezari and Robert G. Knollenberg "Surface Analysis For The Characterization Of Defects In Thin Film Processes", Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); https://doi.org/10.1117/12.962826

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available