Ultrafast laser machining: process optimization and applications

Norman Hodgson; Albrecht Steinkopff; Sebastian Heming; Hortense Allegre; Hatim Haloui; Tony S. Lee; Michael Laha; Joris VanNunen

doi:10.1117/12.2584178

5 March 2021 Ultrafast laser machining: process optimization and applications

Norman Hodgson, Albrecht Steinkopff, Sebastian Heming, Hortense Allegre, Hatim Haloui, Tony S. Lee, Michael Laha, Joris VanNunen

Author Affiliations +

Proceedings Volume 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI; 1167308 (2021) https://doi.org/10.1117/12.2584178
Event: SPIE LASE, 2021, Online Only

Abstract

Over the last decade industrial ultrafast lasers with pulse durations between 300 fs and 10 ps, average output powers of up to 150 W and single pulse energies in the range of 10 to 250 μJ have been deployed in various industrial applications that require microscopic material removal within small areas with minimum heat affected zones. This paper will provide a detailed understanding of the influence of laser wavelength, pulse duration, pulse fluence and the temporal distribution of the laser pulses (i.e. seeder burst mode operation) on the speed and quality of the machining process. Experimental data for more than 25 materials commonly used in micro-machining applications have led to guidelines for optimizing ultrafast laser machining processes. A review of the industrial ultrafast laser market and a discussion of the main applications are also provided.

Conference Presentation

Citation Download Citation

Norman Hodgson, Albrecht Steinkopff, Sebastian Heming, Hortense Allegre, Hatim Haloui, Tony S. Lee, Michael Laha, and Joris VanNunen "Ultrafast laser machining: process optimization and applications", Proc. SPIE 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI, 1167308 (5 March 2021); https://doi.org/10.1117/12.2584178

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available