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5 March 2021 Simultaneous estimation of thickness and refractive index by combining transmission and reflection measurements
Imke Busboom, Simon Christmann, Hartmut Haehnel, Volker K. S. Feige, Bernd Tibken
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Proceedings Volume 11685, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIV; 116851L (2021) https://doi.org/10.1117/12.2577601
Event: SPIE OPTO, 2021, Online Only
Abstract
Investigating layer thicknesses with terahertz time-domain spectroscopy usually requires the refractive index of the layer of interest. The refractive index is either investigated beforehand by independent measurements or it is measured simultaneously. The challenge of a simultaneous determination is that measuring two unknown values requires the use of two linearly independent equations. To address this challenge, our approach is to combine transmission and re ection time-of-flight measurements. By combining these measurements, we obtain a system of two linearly independent equations for the two unknown values: thickness and average refractive index. We experimentally validate our simultaneous estimation approach by measuring calibration foils of different thicknesses.
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Imke Busboom, Simon Christmann, Hartmut Haehnel, Volker K. S. Feige, and Bernd Tibken "Simultaneous estimation of thickness and refractive index by combining transmission and reflection measurements", Proc. SPIE 11685, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XIV, 116851L (5 March 2021); https://doi.org/10.1117/12.2577601
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KEYWORDS
Refractive index
Spectroscopy
Terahertz spectroscopy
Time metrology
Nondestructive evaluation
Refraction
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