Efficient driver and high accuracy sense ASICs for piezoelectric micro-mirrors

Andrea Barbieri; Luca Molinari; Marco Zamprogno

doi:10.1117/12.2577150

5 March 2021 Efficient driver and high accuracy sense ASICs for piezoelectric micro-mirrors

Andrea Barbieri, Luca Molinari, Marco Zamprogno

Proceedings Volume 11697, MOEMS and Miniaturized Systems XX; 116970G (2021) https://doi.org/10.1117/12.2577150
Event: SPIE OPTO, 2021, Online Only

Abstract

This paper presents a full system, based on two dedicated ASICs, to drive and control a resonant piezoelectric micromirror. The driving ASIC, exploiting the essentially capacitive-like pseudo-differential behavior of the micro-mirror, implements an innovative and efficient energy recovery topology. With only two additional external capacitors, C·V² ·f load power consumption can be reduced by a theoretical factor 6. It works up to 40V driving voltage, providing two trapezoidal signals in phase opposition up to 65kHz driving frequency in order to be compatible with most of the micromirror devices. Driving signal amplitude can be adjusted at 15 bits resolution through a novel low-frequency noise free circuit for opening angle control (OAC), briefly described. Classical resistive Wheatstone bridge, designed close to the rotational springs, provides a voltage signal representative of the micro-mirror position. Sensing ASIC is aimed to bias the bridge and read the output voltage extracting high-resolution data for mirror resonance frequency control. A new circuital solution allows to compensate for resistive bridge sensitivity variations in temperature without any additional sensor on the mirror. The two ASICs have been diffused in BCD 0.18mm process at 3.3V voltage supply, preliminary step for a full integration of driving and sensing parts. Silicon results show that driver is effectively able to reduce load power consumption by a factor > 5 with only 2.5mW additional consumption at 40V and 25kHz driving signal, on top of integrated Boost converter efficiency. Control algorithms, based on sensing data, allow to keep stable resonance frequency providing 7mdegRMS mechanical accuracy over ±15deg opening angle.

Conference Presentation

Citation Download Citation

Andrea Barbieri, Luca Molinari, and Marco Zamprogno "Efficient driver and high accuracy sense ASICs for piezoelectric micro-mirrors", Proc. SPIE 11697, MOEMS and Miniaturized Systems XX, 116970G (5 March 2021); https://doi.org/10.1117/12.2577150

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