Control surface roughness of mirror

Oleg V. Angelsky; Andrew P. Maksimyak; Peter P. Maksimyak

doi:10.1117/12.2571208

31 December 2020 Control surface roughness of mirror

Oleg V. Angelsky, Andrew P. Maksimyak, Peter P. Maksimyak

Proceedings Volume 11718, Advanced Topics in Optoelectronics, Microelectronics and Nanotechnologies X; 117181G (2020) https://doi.org/10.1117/12.2571208
Event: Advanced Topics in Optoelectronics, Microelectronics and Nanotechnologies 2020, 2020, Online Only

Abstract

The relationship between statistical structure parameters of rough surface and associated correlation parameters of scattered field is based on the model of random phase object. We propose two technique for measuring surface roughness of mirror, which use measurement of a the contrast of the interference pattern in a field, as well as the devices implementing those techniques. One of them is based on measurement of a phase variance of the boundary object field while another of them is based on measurement of a transverse coherence function of a field. The sensitivity limit of the method in measuring the standard deviation of surface profile from base line is about 2 nm.

Citation Download Citation

Oleg V. Angelsky, Andrew P. Maksimyak, and Peter P. Maksimyak "Control surface roughness of mirror", Proc. SPIE 11718, Advanced Topics in Optoelectronics, Microelectronics and Nanotechnologies X, 117181G (31 December 2020); https://doi.org/10.1117/12.2571208

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