Silica-based Single-Mode Guided-Wave Devices

Norio Takato; Masao Kawachi; Motohiro Nakahara; Tadashi Miyashita

doi:10.1117/12.963322

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5 January 1990 Silica-based Single-Mode Guided-Wave Devices

Norio Takato, Masao Kawachi, Motohiro Nakahara, Tadashi Miyashita

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Proceedings Volume 1177, Integrated Optics and Optoelectronics; (1990) https://doi.org/10.1117/12.963322
Event: OE/FIBERS '89, 1989, Boston, United States

Abstract

Silica-based single-mode waveguides, fabricated on silicon substrates by a combination of flame hydrolysis deposition and reactive ion etching, have low propagation loss and low fiber coupling loss. High controllability in the silica-based waveguide fabrication leads to directional couplers with an accurate coupling ratio can be fabricated. Based on these advantageous features, we have successfully constructed a variety of guided-wave devices such as multi/demultiplexers for 1.3 and 1.55 μm wavelength, 2 x 8 couplers, ring resonators, and Mach-Zehnder interferometers which operate as optical switches or multi/demultiplexers with various channel spacings from 0.008 nm to 0.25 μm.

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Norio Takato, Masao Kawachi, Motohiro Nakahara, and Tadashi Miyashita "Silica-based Single-Mode Guided-Wave Devices", Proc. SPIE 1177, Integrated Optics and Optoelectronics, (5 January 1990); https://doi.org/10.1117/12.963322

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