Virtual coherence scanning interferometer for surface measurement

Rong Su; Richard K. Leach

doi:10.1117/12.2592255

20 June 2021 Virtual coherence scanning interferometer for surface measurement

Rong Su, Richard K. Leach

Proceedings Volume 11782, Optical Measurement Systems for Industrial Inspection XII; 117820L (2021) https://doi.org/10.1117/12.2592255
Event: SPIE Optical Metrology, 2021, Online Only

Abstract

We demonstrate a virtual optical instrument for surface measurement. The virtual instrument is fully powered by physical models derived from first principles and provides deterministic measurement results for surfaces with complex topography as obtained using a real instrument. The primary function of the virtual instrument is task-specific uncertainty evaluation; it can also be used to predict the instrument response and measurement result, in order to assess the feasibility of an instrument for a specific surface, find optimal instrument settings, improve the understanding of the measurement process and test new instrument configurations.

Conference Presentation

Citation Download Citation

Rong Su and Richard K. Leach "Virtual coherence scanning interferometer for surface measurement", Proc. SPIE 11782, Optical Measurement Systems for Industrial Inspection XII, 117820L (20 June 2021); https://doi.org/10.1117/12.2592255

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