Optical Properties of Copper-Aluminum Oxide Nanocomposite Thin Films Deposited by Sputtering Atomic Layer Augmented Deposition (SALAD)

Jacob H. Sands; Soren A. Tornoe; Sreyes P. Venkatesh; Greyson R. Shoop; Nobuhiko P. Kobayashi

doi:10.1117/12.2595320

1 August 2021 Optical Properties of Copper-Aluminum Oxide Nanocomposite Thin Films Deposited by Sputtering Atomic Layer Augmented Deposition (SALAD)

Jacob H. Sands, Soren A. Tornoe, Sreyes P. Venkatesh, Greyson R. Shoop, Nobuhiko P. Kobayashi

Author Affiliations +

Proceedings Volume 11800, Low-Dimensional Materials and Devices 2021; 1180009 (2021) https://doi.org/10.1117/12.2595320
Event: SPIE Nanoscience + Engineering, 2021, San Diego, California, United States

Abstract

Depositing thin films is often limited to a specific deposition process by which precursors are transported in a deposition environment. In other words, a deposition environment in which two deposition processes complementary to each other are unified may offer new insights in designing thin film structures. This view motivated us to combine atomic layer deposition (ALD) and magnetron sputtering (SPU) in a single chamber – sputtering atomic layer augmented deposition (SALAD). The SALAD system offers benefits of consistently delivering precursors in ALD and freely choosing chemical elements in SPU. In this paper, the SALAD system is employed to deposit nanocomposites consisting of multiple layers of aluminum oxide deposited by ALD and copper layers deposited by SPU. Distinctive dispersion features seen in optical properties of the nanocomposites are analyzed to reveal the interrelationship between structural properties and electronic properties of the nanocomposites.

Conference Presentation

Citation Download Citation

Jacob H. Sands, Soren A. Tornoe, Sreyes P. Venkatesh, Greyson R. Shoop, and Nobuhiko P. Kobayashi "Optical Properties of Copper-Aluminum Oxide Nanocomposite Thin Films Deposited by Sputtering Atomic Layer Augmented Deposition (SALAD)", Proc. SPIE 11800, Low-Dimensional Materials and Devices 2021, 1180009 (1 August 2021); https://doi.org/10.1117/12.2595320

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