Materials and applications perspectives for Ga2O3

David J. Rogers; Ferechteh Teherani; Philippe Bove; Eric Sandana

doi:10.1117/12.2601744

2 August 2021 Materials and applications perspectives for Ga₂O₃

David J. Rogers, Ferechteh Teherani, Philippe Bove, Eric Sandana

Proceedings Volume 11801, UV and Higher Energy Photonics: From Materials to Applications 2021; 1180109 (2021) https://doi.org/10.1117/12.2601744
Event: SPIE Nanoscience + Engineering, 2021, San Diego, California, United States

Abstract

Recently, there has been a surge in interest for the ultra wide bandgap (Eg ~ 4.9 eV) semiconductor gallium oxide (Ga2O3). A key driver for this boom is that single crystal wide area bulk β-Ga2O3 substrates have become commercially available and a variety of methods have been shown to give high quality epitaxial growth. Although Ga2O3 has a number of polymorph forms (α-, β-, γ-, δ- and ε) the more stable monoclinic phase (β-Ga2O3) has attracted the most attention. Amongst a whole range of potential applications power/switching electronics, solar-blind photodetectors and solar transparent electrodes offer exciting perspectives. In this talk we give an overview of these applications illustrated with examples from the β-Ga2O3 development work carried out at the French oxide semiconductor epiwafer company, Nanovation, www.nanovation.com.

Conference Presentation

Citation Download Citation

David J. Rogers, Ferechteh Teherani, Philippe Bove, and Eric Sandana "Materials and applications perspectives for Ga₂O₃", Proc. SPIE 11801, UV and Higher Energy Photonics: From Materials to Applications 2021, 1180109 (2 August 2021); https://doi.org/10.1117/12.2601744

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