Stripline Measurements of Surface Resistance: Relation to HTSC Film Properties and Deposition Methods

D. E. Oates; A. C. Anderson

doi:10.1117/12.965175

19 March 1990 Stripline Measurements of Surface Resistance: Relation to HTSC Film Properties and Deposition Methods

D. E. Oates, A. C. Anderson

Proceedings Volume 1187, Processing of Films for High Tc Superconducting Electronics; (1990) https://doi.org/10.1117/12.965175
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States

Abstract

We describe the measurement of microwave surface resistance, Rs, of thin films of high-transition-temperature superconductors by the stripline resonator method. This method allows measurement of Rs as a function of frequency from 0.5 GHz to 20 GHz and has a sensitivity of greater than 1 x10-7 Ω. Rs for films deposited by various methods has been measured, and a limited temperature dependence for one YBCO film is also reported. The results are related to the deposition methods and film properties.

Citation Download Citation

D. E. Oates and A. C. Anderson "Stripline Measurements of Surface Resistance: Relation to HTSC Film Properties and Deposition Methods", Proc. SPIE 1187, Processing of Films for High Tc Superconducting Electronics, (19 March 1990); https://doi.org/10.1117/12.965175

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