AEMPES: An Expert System For In-Situ Diagnostics And Process Monitoring

Su-sing Chen

doi:10.1117/12.963949

15 February 1990 AEMPES: An Expert System For In-Situ Diagnostics And Process Monitoring

Su-sing Chen

Proceedings Volume 1188, Multichamber and In-Situ Processing of Electronic Materials; (1990) https://doi.org/10.1117/12.963949
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States

Abstract

The logical architecture of an expert system AEMPES (Advanced Electronic Materials Processing Expert System) for in-situ diagnostics and process monitoring of advanced electronic materials processing is described. It is a distributed AI system with both the end-process and in-process diagnostics and monitoring capabilities. Techniques of sensor fusion, spatial reasoning, machine learning, reasoning with uncertainty and model-based reasoning are employed in the system.

Citation Download Citation

Su-sing Chen "AEMPES: An Expert System For In-Situ Diagnostics And Process Monitoring", Proc. SPIE 1188, Multichamber and In-Situ Processing of Electronic Materials, (15 February 1990); https://doi.org/10.1117/12.963949

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