Stress-induced birefringence calibration of large aperture dynamic interferometer based on the rotation of light source polarization state

XInyu Miao; Jun Ma; Caojin Yuan

doi:10.1117/12.2601349

9 October 2021 Stress-induced birefringence calibration of large aperture dynamic interferometer based on the rotation of light source polarization state

XInyu Miao, Jun Ma, Caojin Yuan

Author Affiliations +

Proceedings Volume 11899, Optical Metrology and Inspection for Industrial Applications VIII; 1189911 (2021) https://doi.org/10.1117/12.2601349
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Conference Poster

Abstract

The measurement of large aperture optical components becomes much more critical as they are increasingly being used in high power systems and astronomical systems. Large aperture transmissive optical elements always suffer from stressinduced birefringence, which leads to the difference of profiles for linearly polarized beams with different orientations. A spatially varying optical path difference is introduced into the measurement result as wavefront aberration in a dynamic interferometer based on the polarization phase-shifting method. This paper proposed a method to measure and correct the birefringence effect for a 600mm aperture dynamic interferometer based on the rotation of the incident polarized beam, needing no more additional elements. The interferometer includes a Kepler beam expander system consisting of two collimators with 100mm and 600mm aperture. The 600mm aperture collimator is viewed as a transmitting element between the interference cavity of a 100mm TF and a 600mm RF. The polarization state of the incident beam can be switched between P light and S light, where a phase difference can be obtained between two measurements. The difference between the two distributions can be viewed as the birefringence effect on the dynamic interferometer. Besides, the system error can be removed during the data subtraction. Experiments are conducted on a 600mm dynamic interferometer and the correction result is compared with a wavelength tuning method which is free of polarization errors brought by the stress-induced birefringence stress. A comparison is also conducted with the correction result realized via a wave plate model proposed before.

Conference Presentation

Citation Download Citation

XInyu Miao, Jun Ma, and Caojin Yuan "Stress-induced birefringence calibration of large aperture dynamic interferometer based on the rotation of light source polarization state", Proc. SPIE 11899, Optical Metrology and Inspection for Industrial Applications VIII, 1189911 (9 October 2021); https://doi.org/10.1117/12.2601349

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