Depth-of-focus extension in null interferometric microscopy for ICF capsule surface-defects detection

Cong Wei; Jun Ma

doi:10.1117/12.2601473

9 October 2021 Depth-of-focus extension in null interferometric microscopy for ICF capsule surface-defects detection

Cong Wei, Jun Ma

Proceedings Volume 11899, Optical Metrology and Inspection for Industrial Applications VIII; 1189913 (2021) https://doi.org/10.1117/12.2601473
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Conference Poster

Abstract

Null interferometric microscope (NIM) is an effective method for detecting the isolated defects on the ICF capsule’s surfaces thanks to its null interference and high-resolution imaging ability. However, the limited depth-of-focus (DOF) caused by the large numerical aperture is the main drawback that prevents measuring defects in the full field of view (FOV) on the curved surface. In this work, a depth-of-focus (DOF) extension method based on numerical propagation is proposed to expand the field of view (FOV) of the NIM. The capability of the proposed DOF extension method is proved by the measurement of a 1-mm diameter ICF capsule. Experiment results indicate that the FOV of NIM is expanded from 140 μm to 320 μm.

Conference Presentation

Citation Download Citation

Cong Wei and Jun Ma "Depth-of-focus extension in null interferometric microscopy for ICF capsule surface-defects detection", Proc. SPIE 11899, Optical Metrology and Inspection for Industrial Applications VIII, 1189913 (9 October 2021); https://doi.org/10.1117/12.2601473

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