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23 February 1990 X-ray photoelectron spectroscopy studies on polymer surfaces after KrF laser ablation
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Proceedings Volume 1190, Laser/Optical Processing of Electronic Materials; (1990)
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States
The chemical structures of polyimide(PI) and polyethylene terephthalate) (PET) surfaces after ablation with a single laser pulse from a KrF excimer laser are studied by x-ray photoelectron spectroscopy(XPS). For both polymers, carbon-rich surfaces with a modified bonding environment are found to be produced. The formation mechanisms of these surfaces are discussed in terms of the etching processes based on the preferential bond breaking between the aromatic rings and imide groups in PI and between the aromatic ring and carbonyl groups in PET, followed by rearrangement and recombination reactions. Furthermore, as a result of angular-dependent XPS studies/ the changes in atomic concentration and bonding environment along a 4~º100Å depth of the surfaces remaining after ablation are observed. The possibility of surface oxidation after ablation is discussed.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fumio Kokai, Hideaki Saito, and Tomoo Fujioka "X-ray photoelectron spectroscopy studies on polymer surfaces after KrF laser ablation", Proc. SPIE 1190, Laser/Optical Processing of Electronic Materials, (23 February 1990);


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