Shape control using hologram-assisted talbot lithography

Naoki Ura; Yasuhiro Mizutani; Ryu Ezaki; Tsutomu Uenohara; Yoshihiko Makiura; Yasuhiro Takaya

doi:10.1117/12.2616249

27 October 2021 Shape control using hologram-assisted talbot lithography

Naoki Ura, Yasuhiro Mizutani, Ryu Ezaki, Tsutomu Uenohara, Yoshihiko Makiura, Yasuhiro Takaya

Proceedings Volume 11927, Optical Technology and Measurement for Industrial Applications Conference 2021; 1192708 (2021) https://doi.org/10.1117/12.2616249
Event: SPIE Technologies and Applications of Structured Light, 2021, Online, Japan

Abstract

In recent years, unique functions of nano-periodic structures have attracted much attention, and there is a need for processing techniques with high processing efficiency and flexibility. Therefore, we focused on Talbot lithography, which has excellent processing efficiency for periodic structures. In this paper, we use hologram-assisted Talbot lithography to improve the processing flexibility of Talbot lithography. Hologram-assisted Talbot lithography is a method to improve the processing flexibility of structures by using CNN to estimate the incident light distribution. In order to improve the accuracy of the hologram-assisted Talbot lithography method for controlling periodic structures, we studied the learning of CNN. And we showed that the shape and period of the structure can be controlled by using CNN.

Citation Download Citation

Naoki Ura, Yasuhiro Mizutani, Ryu Ezaki, Tsutomu Uenohara, Yoshihiko Makiura, and Yasuhiro Takaya "Shape control using hologram-assisted talbot lithography", Proc. SPIE 11927, Optical Technology and Measurement for Industrial Applications Conference 2021, 1192708 (27 October 2021); https://doi.org/10.1117/12.2616249

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KEYWORDS

Lithography

Holograms

Image filtering

Convolution

Finite-difference time-domain method

Modulation

Photoresist materials

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