An in-depth look at comprehensive and efficient methodology for CD uniformity budget breakdown

Ulrich Denker; Philip Gröger; Xaver Thrun; Stefan Buhl; Mycahya Eggleston; Nhi Doan; Gou Kawaguchi; Ranjan Khurana

doi:10.1117/12.2613709

26 May 2022 An in-depth look at comprehensive and efficient methodology for CD uniformity budget breakdown

Ulrich Denker, Philip Gröger, Xaver Thrun, Stefan Buhl, Mycahya Eggleston, Nhi Doan, Gou Kawaguchi, Ranjan Khurana

Proceedings Volume 12053, Metrology, Inspection, and Process Control XXXVI; 120531V (2022) https://doi.org/10.1117/12.2613709
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Conference Poster

Abstract

Understanding contributors to critical dimension uniformity (CDU) is becoming ever more important. We propose a systematic CDU breakdown into contributions that can be attributed to local CDU, intra-field CDU, field-to-field CDU, intra-lot CDU and lot-to-lot CD variations using smart metric definitions. We checked the CDU breakdown on synthetic data as well as on real DRAM production data. Comparing our CDU breakdown to results from nested ANOVA made with statistical software packages, we could verify that the results were very close, while our calculation method was orders of magnitude faster.

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Ulrich Denker, Philip Gröger, Xaver Thrun, Stefan Buhl, Mycahya Eggleston, Nhi Doan, Gou Kawaguchi, and Ranjan Khurana "An in-depth look at comprehensive and efficient methodology for CD uniformity budget breakdown", Proc. SPIE 12053, Metrology, Inspection, and Process Control XXXVI, 120531V (26 May 2022); https://doi.org/10.1117/12.2613709

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