Optical element surface defects detection and quantitative evaluation standard based on dark-field imaging

Yongying Yang; Weimin Lou; Pengfei Zhang; Fanyi Wang; Zichen Lu; Pin Cao; Jiabin Jiang; Xiang Xiao

doi:10.1117/12.2603542

1 November 2021 Optical element surface defects detection and quantitative evaluation standard based on dark-field imaging

Yongying Yang, Weimin Lou, Pengfei Zhang, Fanyi Wang, Zichen Lu, Pin Cao, Jiabin Jiang, Xiang Xiao

Author Affiliations +

Proceedings Volume 12057, Twelfth International Conference on Information Optics and Photonics; 1205702 (2021) https://doi.org/10.1117/12.2603542
Event: Twelfth International Conference on Information Optics and Photonics, 2021, Xi'an, China

Abstract

Quantitative defects detection has always been the one of the difficulties in optical element surface quality evaluation. In order to solve this problem, the optical element surface defects detection based on dark-field imaging system, which has been researched by our group team for nearly twenty years, has been summarized. The plane and sphere optical element surface defects detection details are introduced. Specifically, it involves plane optical element surface leveling, sphere optical element spherical center alignment, low magnification image acquisition, low magnification image stitching, feature extraction, high magnification defects detection and report output based on the form of specific standard (Such as America Military Standard MIL-PRF-13830B or China National Standard GB/T 1185-2006). Besides, a China National Standard about digitized quantitative measurement of the defect, which is proposed by our group (now is in the stage of request for public advice), is also introduced.

Citation Download Citation

Yongying Yang, Weimin Lou, Pengfei Zhang, Fanyi Wang, Zichen Lu, Pin Cao, Jiabin Jiang, and Xiang Xiao "Optical element surface defects detection and quantitative evaluation standard based on dark-field imaging", Proc. SPIE 12057, Twelfth International Conference on Information Optics and Photonics, 1205702 (1 November 2021); https://doi.org/10.1117/12.2603542

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