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We present the design of a “hole” meta-atom basis, the inverse of nanorods, in the silicon-on-insulator (SOI) platform with a zinc sulfide (ZnS) anti-reflection (AR) layer that gives an average transmittance of 92% across half of the midwave infrared (MWIR) band from 3.5 to 4.5 μm. We numerically show this hole meta-atom exhibits reduced phase dispersion across the MWIR compared to the archetypal rod geometry. Effective index modelling is shown to accurately describe propagation phase delay through hole meta-atom periodic array. Bloch eigenmode analysis further reveals the small phase dispersion originates from its small modal index dispersion. A simple, analytical effective index model that only involves geometric and material parameters such as array filling factor and material refractive index is demonstrated. We further use this hole meta-atom to design a pair of metasurfaces to correct optical aberrations from a conventional lens and show that the performance is superior to its rod counterpart due to the reduced phase dispersion.
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Ko-Han Shih, C. Kyle Renshaw, "Low-dispersion nanohole metasurfaces for refractive-diffractive hybrid lens design in MWIR," Proc. SPIE 12103, Advanced Optics for Imaging Applications: UV through LWIR VII, 1210304 (27 May 2022); https://doi.org/10.1117/12.2617786