Research of resonance frequencies of silicon membranes for a fiber-optic acoustic receiver

Sofya V. Malokhatko; Evgeny Yu. Gusev; Oleg A. Ageev; Timofey A. Efimov; Evgeny A. Rassolov; Roman V. Romashko

doi:10.1117/12.2624430

30 January 2022 Research of resonance frequencies of silicon membranes for a fiber-optic acoustic receiver

Sofya V. Malokhatko, Evgeny Yu. Gusev, Oleg A. Ageev, Timofey A. Efimov, Evgeny A. Rassolov, Roman V. Romashko

Proceedings Volume 12157, International Conference on Micro- and Nano-Electronics 2021; 121570R (2022) https://doi.org/10.1117/12.2624430
Event: International Conference on Micro- and Nano-Electronics 2021, 2021, Zvenigorod, Russian Federation

Abstract

The article presents the results of designing, manufacturing, and studying the resonant properties of a square silicon membrane for use in a fiber-optic acoustic receiver. The dependences of resonant frequency on edge length (6-9 mm) and thickness of the membrane (30-50 μm) are obtained. The geometrical parameters of the membrane satisfying the values of resonant frequency (2-60 kHz), pressure (0.1-14 Pa), and deviation (10 nm) are determined: edge length is 8 mm and thickness is 40-50 μm (9.2-42.3 kHz). A series of square silicon membranes was fabricated by anisotropic wet etching. The amplitude-frequency characteristics of the membranes were experimentally measured using an adaptive holographic interferometer. For a square membrane of 8×8×0.044 m³, the experimentally measured resonant frequency was 10.1 kHz, which is consistent with the results of numerical simulation.

Citation Download Citation

Sofya V. Malokhatko, Evgeny Yu. Gusev, Oleg A. Ageev, Timofey A. Efimov, Evgeny A. Rassolov, and Roman V. Romashko "Research of resonance frequencies of silicon membranes for a fiber-optic acoustic receiver", Proc. SPIE 12157, International Conference on Micro- and Nano-Electronics 2021, 121570R (30 January 2022); https://doi.org/10.1117/12.2624430

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