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1 June 1990 Highest-power excimer lasers
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Proceedings Volume 1225, High-Power Gas Lasers; (1990) https://doi.org/10.1117/12.18480
Event: OE/LASE '90, 1990, Los Angeles, CA, United States
Abstract
A historical overview over the development of excimer lasers into the multi-100 Watt range is given. Special emphasis is on efforts in Japan and Europe concerning excimer lasers with an average power exceeding 1 kilowatt. The overview includes a discussion of the different excitation mechanisms.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Elmar Mueller-Horsche, Peter Oesterlin, and Dirk Basting "Highest-power excimer lasers", Proc. SPIE 1225, High-Power Gas Lasers, (1 June 1990); https://doi.org/10.1117/12.18480
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