Intense high-repetition-rate excimer lasers and applications

Vladimir Yu. Baranov; Vladimir M. Borisov; Aleksandr Yu. Vinokhodov; Yu. B. Kiryukhin; Yu. Yu. Stepanov; Oleg B. Khristoforov

doi:10.1117/12.18483

1 June 1990 Intense high-repetition-rate excimer lasers and applications

Vladimir Yu. Baranov, Vladimir M. Borisov, Aleksandr Yu. Vinokhodov, Yu. B. Kiryukhin, Yu. Yu. Stepanov, Oleg B. Khristoforov

Author Affiliations +

Proceedings Volume 1225, High-Power Gas Lasers; (1990) https://doi.org/10.1117/12.18483
Event: OE/LASE '90, 1990, Los Angeles, CA, United States

Abstract

Building of high average output power excimer lasers requires the solution of several complex problems. The main challenge is the creation of a uniform discharge which can be easily reproduced even at high pulse repetition rates. Some approaches to solving this problem are discussed. They resulted in creation of lasers with aperture of 4 sq cm operating at 1 kHz producing the output of 420 W at 308 nm. A large-aperture XeCl laser can produce 10 J per pulse at 50 Hz.

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Vladimir Yu. Baranov, Vladimir M. Borisov, Aleksandr Yu. Vinokhodov, Yu. B. Kiryukhin, Yu. Yu. Stepanov, and Oleg B. Khristoforov "Intense high-repetition-rate excimer lasers and applications", Proc. SPIE 1225, High-Power Gas Lasers, (1 June 1990); https://doi.org/10.1117/12.18483

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