Mesoscale surface patterning by ring-shaped lithography for single and array optical elements

M. Knoblich; M. Kraus; D. Stumpf; E. Förster; L. Werner; H. Hillmer; R. Brunner

doi:10.1117/12.2632159

15 July 2022 Mesoscale surface patterning by ring-shaped lithography for single and array optical elements

M. Knoblich, M. Kraus, D. Stumpf, E. Förster, L. Werner, H. Hillmer, R. Brunner

Proceedings Volume 12298, Ninth European Seminar on Precision Optics Manufacturing; 122980D (2022) https://doi.org/10.1117/12.2632159
Event: Ninth European Seminar on Precision Optics Manufacturing, 2022, Teisnach, Germany

Abstract

This contribution addresses an alternative lithographic technique for the tailored fabrication of rotationally symmetric meso- and microscale optical components. A variable ring-shaped light distribution is created by an axicon-pair based zoom-concept and can be used for the manufacturing of single optical components and array elements as well. First, design considerations of the basic axicon system and the achievable system characteristics are discussed. In particular, minimum and maximum ring diameter depending on axicon angle variations and displacement distance of employed axicons as well as potential deviations from the telecentricity condition are considered. Additionally, further aspects concerning the system implementation are presented, e.g. the achievable resolution which is dependent on the entrance pinhole. Finally, the performance of the system is presented by demonstrating the fabrication of exemplary meso- and microscale structures.

Citation Download Citation

M. Knoblich, M. Kraus, D. Stumpf, E. Förster, L. Werner, H. Hillmer, and R. Brunner "Mesoscale surface patterning by ring-shaped lithography for single and array optical elements", Proc. SPIE 12298, Ninth European Seminar on Precision Optics Manufacturing, 122980D (15 July 2022); https://doi.org/10.1117/12.2632159

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KEYWORDS

Axicons

Optical components

Lithography

Light sources

Geometrical optics

Aspheric lenses

Optical arrays

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