Mask Data Preparation, MDP contains comprehensive contents such as reticle layout, mask fracturing, manufacture rule check, etc. We have demonstrated a MDP application on KLA DB inspection. In order to calculate the rendering compensation, Pre-Swath Calibration, PSC is performed before DB inspection. We have built a rule on PSC point searching function which combines the density function of Smart MRC with algorithm. The result shows that this function could save the PSC selection time and also improvement the fail rate of PSC selection. A well-prepared inspection recipe could be done by automation tool. Therefore, the setup time on DB inspection could be minimized, also could save inspection resource as well.
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