Silicon nitride arrayed waveguide grating structures for sensing applications

Muhammad A. Othman; Mohamed A. Swillam

doi:10.1117/12.2650405

17 March 2023 Silicon nitride arrayed waveguide grating structures for sensing applications

Proceedings Volume 12424, Integrated Optics: Devices, Materials, and Technologies XXVII; 1242418 (2023) https://doi.org/10.1117/12.2650405
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

In this work, we investigated the possibilities and limitations of using the arrayed waveguide grating structure in biosensing applications where the arrayed arms region of the structure has been used as a sensing region to maximize the sensitivity and selectivity of the biosensor. The biosensor design is generic and not specific to certain analyte/gas for sensing but rather based on justifying the principle of operation of the biosensor. Here, the concept of sensing is based on the slight change in the effective index of the sensing arms of the arrayed waveguides that happens due to the direct influence of the presence of analyte/gas on the evanescent field of the sensing optical element. The design of the arrayed waveguide grating is done based on silicon nitride (Si3N4) technology due to its transparency in the very near infrared domain which facilitates the operation of the biosensor in the very near-infrared domain where negligible water (in the case of using water as an analyte) absorption values are achievable. The arrayed waveguides region is designed to allow an upper enclosure containing the analyte flow in a chamber made of polydimethylsiloxane over all arms while preserving the additive phase on each arm. The presence of the analyte with an induced refractive indices leads to altering the output wavelength output ports order in the output free propagation region. The shift of the exit wavelengths from different ports is significant to the change in the effective refractive index and consequently to the change in the analyte contents and concentration.

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Muhammad A. Othman and Mohamed A. Swillam "Silicon nitride arrayed waveguide grating structures for sensing applications", Proc. SPIE 12424, Integrated Optics: Devices, Materials, and Technologies XXVII, 1242418 (17 March 2023); https://doi.org/10.1117/12.2650405

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KEYWORDS

Arrayed waveguide gratings

Refractive index

Waveguides

Wave propagation

Design and modelling

Silicon nitride

Structural sensing

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