An integrated optical method to readout µ-Coriolis mass flow sensors

Anneirudh Sundarararjan; Remco J. Wiegerink; Remco G. P. Sanders; Qihui Yu; Joost C. Lötters

doi:10.1117/12.2650589

15 March 2023 An integrated optical method to readout µ-Coriolis mass flow sensors

Anneirudh Sundarararjan, Remco J. Wiegerink, Remco G. P. Sanders, Qihui Yu, Joost C. Lötters

Proceedings Volume 12434, MOEMS and Miniaturized Systems XXII; 124340Q (2023) https://doi.org/10.1117/12.2650589
Event: SPIE OPTO, 2023, San Francisco, California, United States

Conference Poster

Abstract

This paper presents a novel readout for a μ-Coriolis mass flow sensor based on a differential optical reflective method, using a vertical-cavity surface-emitting laser (VCSEL) and two photodiodes (PD). The new readout detects change in applied mass flow rate by measuring the phase shift between the two photodiode signals. Such a setup offers a non-contact and robust sensing method. Measurements are presented for mass flow of DI-water up to 10 gram/hour resulting in a phase shift of 8.7 degrees.

Citation Download Citation

Anneirudh Sundarararjan, Remco J. Wiegerink, Remco G. P. Sanders, Qihui Yu, and Joost C. Lötters "An integrated optical method to readout µ-Coriolis mass flow sensors", Proc. SPIE 12434, MOEMS and Miniaturized Systems XXII, 124340Q (15 March 2023); https://doi.org/10.1117/12.2650589

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