Structured light for topography measurements in the nanometric regime

Valeria Rodríguez-Fajardo; Andrew Forbes

doi:10.1117/12.2649313

15 March 2023 Structured light for topography measurements in the nanometric regime

Valeria Rodríguez-Fajardo, Andrew Forbes

Proceedings Volume 12436, Complex Light and Optical Forces XVII; 124360N (2023) https://doi.org/10.1117/12.2649313
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Surface metrology in the nanometric regime is of increasing relevance in many scientific and industrial applications. Here we present two techniques using structured light to measure topographic features, both being all-digital and contactless and offering improved stability. The first one uses a common path interferometer, scanning the sample to obtain a surface map. The second one takes advantage of the modal description of light to determine the height of a step-like feature. In both cases, we obtained excellent agreement between our measurements and the known reference surfaces, thus demonstrating the good performance of our approaches.

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Citation Download Citation

Valeria Rodríguez-Fajardo and Andrew Forbes "Structured light for topography measurements in the nanometric regime", Proc. SPIE 12436, Complex Light and Optical Forces XVII, 124360N (15 March 2023); https://doi.org/10.1117/12.2649313

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