Flexible approach for the production slanted surface relief gratings by ion beam trimming (Conference Presentation)

Mandy Göring; Thoralf Dunger

doi:10.1117/12.2650136

16 March 2023 Flexible approach for the production slanted surface relief gratings by ion beam trimming (Conference Presentation)

Mandy Göring, Thoralf Dunger

Author Affiliations +

Proceedings Volume 12449, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV; 124490B (2023) https://doi.org/10.1117/12.2650136
Event: SPIE AR | VR | MR, 2023, San Francisco, California, United States

Abstract

The production of surface relief gratings (SRG) plays a crucial role in nano-structuring. Applications range from laser mirrors to manufacturing of waveguides for mixed and augmented reality. In order to fabricate lightweight near eye displays SRGs are used for coupling the light from the source into the waveguide and out of the waveguide towards the eye. Ion Beam Trimming is a well-established method in the MEMS industry to locally change the thickness of a functional layer on a substrate and was adapted as a very flexible approach for the production of SRGs with varying slant angles and varying trench depth.

Conference Presentation

Citation Download Citation

Mandy Göring and Thoralf Dunger "Flexible approach for the production slanted surface relief gratings by ion beam trimming (Conference Presentation)", Proc. SPIE 12449, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV, 124490B (16 March 2023); https://doi.org/10.1117/12.2650136

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