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The production of surface relief gratings (SRG) plays a crucial role in nano-structuring. Applications range from laser mirrors to manufacturing of waveguides for mixed and augmented reality. In order to fabricate lightweight near eye displays SRGs are used for coupling the light from the source into the waveguide and out of the waveguide towards the eye. Ion Beam Trimming is a well-established method in the MEMS industry to locally change the thickness of a functional layer on a substrate and was adapted as a very flexible approach for the production of SRGs with varying slant angles and varying trench depth.
Mandy Göring andThoralf Dunger
"Flexible approach for the production slanted surface relief gratings by ion beam trimming (Conference Presentation)", Proc. SPIE 12449, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV, 124490B (16 March 2023); https://doi.org/10.1117/12.2650136
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Mandy Göring, Thoralf Dunger, "Flexible approach for the production slanted surface relief gratings by ion beam trimming (Conference Presentation)," Proc. SPIE 12449, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV, 124490B (16 March 2023); https://doi.org/10.1117/12.2650136