Kinetic simulations of plasma dynamics in the EUV sources

Kirill V. Lezhnin; Samuel Totorica; Abdullah Hyder; John Sheil; Oscar O. Versolato; Ahmed Diallo; William Fox

doi:10.1117/12.2658454

28 April 2023 Kinetic simulations of plasma dynamics in the EUV sources

Kirill V. Lezhnin, Samuel Totorica, Abdullah Hyder, John Sheil, Oscar O. Versolato, Ahmed Diallo, William Fox

Author Affiliations +

Proceedings Volume 12494, Optical and EUV Nanolithography XXXVI; 1249418 (2023) https://doi.org/10.1117/12.2658454
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Conference Poster

Abstract

Fast ion debris generated in laser-tin droplet interaction is known to degrade the reflectivity of the EUV collector mirror, posing a challenge to the commercial use of the EUV source. In the present work, we conduct one-dimensional fully kinetic Particle-In-Cell simulations using PSC code that is capable of capturing fast ion debris formation. We discuss the progress in the implementation of physics modules for the PSC code that is required to replicate the EUV generation process in detail. We demonstrate decent agreement between our kinetic simulations and radiation hydrodynamics simulations in terms of macroscopic plasma parameters. We also discuss the role of the kinetic effects in EUV and next-generation BEUV sources.

Citation Download Citation

Kirill V. Lezhnin, Samuel Totorica, Abdullah Hyder, John Sheil, Oscar O. Versolato, Ahmed Diallo, and William Fox "Kinetic simulations of plasma dynamics in the EUV sources", Proc. SPIE 12494, Optical and EUV Nanolithography XXXVI, 1249418 (28 April 2023); https://doi.org/10.1117/12.2658454

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