Reconstruction of the in-depth profile of line gratings with critical dimension grazing incidence small angle x-ray scattering on a laboratory equipment

Guillaume Freychet; Guido Rademaker; Yoann Blancquaert; Patrice Gergaud

doi:10.1117/12.2657500

27 April 2023 Reconstruction of the in-depth profile of line gratings with critical dimension grazing incidence small angle x-ray scattering on a laboratory equipment

Guillaume Freychet, Guido Rademaker, Yoann Blancquaert, Patrice Gergaud

Author Affiliations +

Proceedings Volume 12496, Metrology, Inspection, and Process Control XXXVII; 124961L (2023) https://doi.org/10.1117/12.2657500
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

We present a reconstruction of the in-depth profile of line gratings using critical-dimension grazing incidence small angle x-ray scattering with a compact Cu-Kα x-ray source mounted on a laboratory SAXS. By taking advantage of the grazing-incidence configuration and with a rotation of the gratings under the x-ray beam, several orders of the Bragg rods were probed and lead to the extraction of the in-depth profile of the lines. The extracted in-depth profile is compared with 3D-AFM results. The methodology developed mimics the one of CD-SAXS measurements, in transmission, in order to enable future comparison between the two approaches as well as building complementary modeling. These results open new perspectives for x-ray metrology at the fab since the Cu-Kα x-ray source is the most developed, spread and used source by the x-ray community.

Conference Presentation

Citation Download Citation

Guillaume Freychet, Guido Rademaker, Yoann Blancquaert, and Patrice Gergaud "Reconstruction of the in-depth profile of line gratings with critical dimension grazing incidence small angle x-ray scattering on a laboratory equipment", Proc. SPIE 12496, Metrology, Inspection, and Process Control XXXVII, 124961L (27 April 2023); https://doi.org/10.1117/12.2657500

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