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15 June 2023 Radiation effects and underlying damage mechanisms in CMOS SPADs
L. Ratti, G. Torilla
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Proceedings Volume 12512, Advanced Photon Counting Techniques XVII; 1251209 (2023) https://doi.org/10.1117/12.2665157
Event: SPIE Defense + Commercial Sensing, 2023, Orlando, Florida, United States
Abstract
Effects of radiation on the dark count rate (DCR) of CMOS single photon avalanche diodes (SPADs) is reviewed. Both total ionizing and non ionizing dose effects are investigated using a test SPAD chip fabricated in a 180 nm CMOS technology as a case study. Models predicting the probability of damage, estimated through the measurement of DCR increase, are also presented. Emphasis is set on the damage dependence on radiation dose and device geometry. Particular attention is paid to the stochastic phenomena taking place in the sensitive volume of SPADs when they are exposed to relatively low fluences (micro-doses) of neutrons.
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L. Ratti and G. Torilla "Radiation effects and underlying damage mechanisms in CMOS SPADs", Proc. SPIE 12512, Advanced Photon Counting Techniques XVII, 1251209 (15 June 2023); https://doi.org/10.1117/12.2665157
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KEYWORDS
Single photon avalanche diodes
Annealing
Sensors
Ionizing radiation
X-rays
Design and modelling
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