Environmental effects on registration and accuracy data on quartz photomasks utilizing the LMS-2000 laser metrology system

Larry E. Land; John M. Whittey

doi:10.1117/12.20072

1 June 1990 Environmental effects on registration and accuracy data on quartz photomasks utilizing the LMS-2000 laser metrology system

Larry E. Land, John M. Whittey

Author Affiliations +

Proceedings Volume 1261, Integrated Circuit Metrology, Inspection, and Process Control IV; (1990) https://doi.org/10.1117/12.20072
Event: Microlithography '90, 1990, San Jose, CA, United States

Abstract

Environmental changes in temperature, humidity, and pressure affect registration repeatability and accuracy. Laser wavelength compensation electronics can reduce the effects of environmental fluctuations but not totally eliminate them. When measuring distances as large as 120 mm to an accuracy of less than 50 urn even slight variations in temperature and pressure will have adverse effects on registration repeatability and accuracy. Therefore, careful control and monitoring of these factors is essential in maintaining a stable two dimensional measuring system. In order to access these effects, parts of the environmental control system have been deactivated and the effects observed. By correlating temperature, pressure, and humidity with fluctuations in output data, it is possible to identify and characterize their individual effects. The magnitude of influence of each component varies with amount and duration of change versus the system's ability to respond. Laser wavelength compensation effectiveness can be evaluated by measuring oulput data changes versus environmental changes with and without the compensation system activated.

Citation Download Citation

Larry E. Land and John M. Whittey "Environmental effects on registration and accuracy data on quartz photomasks utilizing the LMS-2000 laser metrology system", Proc. SPIE 1261, Integrated Circuit Metrology, Inspection, and Process Control IV, (1 June 1990); https://doi.org/10.1117/12.20072

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