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15 August 2023 Construction of a time-domain full-field OCT for non-contact volumetric layer thickness measurement
Georgis Bulun, Marvin Lotz, Andrej Keksel, Gerhard Stelzer, Jörg Seewig
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Proceedings Volume 12618, Optical Measurement Systems for Industrial Inspection XIII; 126180S (2023) https://doi.org/10.1117/12.2673664
Event: SPIE Optical Metrology, 2023, Munich, Germany
Abstract
In this paper the design of a Time-Domain Full-Field OCT (TD-FF-OCT) setup for non-contact volumetric layer thickness measurement is presented and quantified in terms of achievable accuracy and performance. The capabilities of the instrument regarding its measuring accuracy are verified using foil thickness standards of different strength. Afterwards, a technical application of measuring a thin and rough varnish coated PET foil (foil thickness tfoil ≈ 150 μm, rough varnish layer thickness tvarnish ≈ 10 μm) is carried out. Since the device is designed to conduct areal measurements, the thickness can be accurately determined over several measurement points. The results are compared with results achieved by applying an alternative but destructive and more time-consuming measuring method (evaluation of microscopic images of respective foil slices produced by using a microtome). Finally, the achievements are summarized and identified optimization potential is highlighted.
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Georgis Bulun, Marvin Lotz, Andrej Keksel, Gerhard Stelzer, and Jörg Seewig "Construction of a time-domain full-field OCT for non-contact volumetric layer thickness measurement", Proc. SPIE 12618, Optical Measurement Systems for Industrial Inspection XIII, 126180S (15 August 2023); https://doi.org/10.1117/12.2673664
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KEYWORDS
Optical coherence tomography
Refractive index
Coating thickness
Coating
Film thickness
Interferometry
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