Characterization of the maximum measurable slope of optical topography measuring instruments

Sai Gao; Andre Felgner; Dorothee Hueser; Silvana Wyss; Uwe Brand

doi:10.1117/12.2673840

15 August 2023 Characterization of the maximum measurable slope of optical topography measuring instruments

Sai Gao, Andre Felgner, Dorothee Hueser, Silvana Wyss, Uwe Brand

Proceedings Volume 12618, Optical Measurement Systems for Industrial Inspection XIII; 126182L (2023) https://doi.org/10.1117/12.2673840
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

The maximum slope that a microscope objective can measure is an important parameter characterizing the measurement capability of 3D optical microscopes. It is one of the most important criteria for selection of appropriate optical topography measuring instruments for areal surface texture measurements and the setting as well. In this article, a method is proposed using optically smooth spheres for characterization of the maximum measurable slope by optical topography measuring instruments with different objectives. The material measure and the measurement procedure are described and the method for the calculation of the measured sphere radius, the maximum measurable local slopes and characterization of the homogeneity of the slope transfer function within the FOV of the objective measured by a confocal microscope are presented.

Citation Download Citation

Sai Gao, Andre Felgner, Dorothee Hueser, Silvana Wyss, and Uwe Brand "Characterization of the maximum measurable slope of optical topography measuring instruments", Proc. SPIE 12618, Optical Measurement Systems for Industrial Inspection XIII, 126182L (15 August 2023); https://doi.org/10.1117/12.2673840

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