The UHV chamber window glass mounting design and analysis

Ming-Ying Hsu; Hok-Sum Fung; Shang-Wei Lin; Gung-Chian Yin

doi:10.1117/12.2672854

28 September 2023 The UHV chamber window glass mounting design and analysis

Ming-Ying Hsu, Hok-Sum Fung, Shang-Wei Lin, Gung-Chian Yin

Proceedings Volume 12669, Optomechanical Engineering 2023; 1266909 (2023) https://doi.org/10.1117/12.2672854
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

This study is to design glass windows for soft X-ray mirror cleaning by UV light. The soft X-ray mirror will operate in the synchrotron radiation light source for several months, and the mirror surface will be covered with a carbon layer. Soft X-ray mirror cleaning uses UV light on the mirror surface and adds a little oxygen to the vacuum chamber. The carbon will be cleaned by UV light and oxygen. Thus, mirror cleaning is needed to design narrow and long windows to let the UV light arrive at the mirror. In the mirror mount in the original design, the bolt joint force causes the mirror to break. Therefore, this study cut the mount's four corners to absorb the bolt joint deformation, not to transfer to the window. A 2 mm diameter tin wire seals the window mount and successfully compensating the bolt joint forces caused the vacuum chamber and window mount deformation. The simulation result shows that this design can make success decline by 28% maximum deformation. The window mounting test is also sealing the achieve 5.5 E-11 mbar l/s.

Conference Presentation

Citation Download Citation

Ming-Ying Hsu, Hok-Sum Fung, Shang-Wei Lin, and Gung-Chian Yin "The UHV chamber window glass mounting design and analysis", Proc. SPIE 12669, Optomechanical Engineering 2023, 1266909 (28 September 2023); https://doi.org/10.1117/12.2672854

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