Observation of IC operation using nematic liquid crystals and the laser scanning microscope

Joachim Fritz; Rainer Lackmann

doi:10.1117/12.20491

1 August 1990 Observation of IC operation using nematic liquid crystals and the laser scanning microscope

Joachim Fritz, Rainer Lackmann

Proceedings Volume 1274, Electro-Optic and Magneto-Optic Materials II; (1990) https://doi.org/10.1117/12.20491
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

A nondestructive analysis method for observing the dynamic operation of integrated circuits is described. The operating principle in reflective mode bases on voltage tunable birefringence in homeotropically aligned nematic liquid crystals with negative dielectric anisotropy. The basic principles of the static and dynamic deformation are discussed and theoretical and experimental results treating the voltage and frequency response are presented. A typical application example of a CMOS IC analysis shows the employment of nematic liquid crystals for failure analysis.

Citation Download Citation

Joachim Fritz and Rainer Lackmann "Observation of IC operation using nematic liquid crystals and the laser scanning microscope", Proc. SPIE 1274, Electro-Optic and Magneto-Optic Materials II, (1 August 1990); https://doi.org/10.1117/12.20491

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