Codes coupling optimization for absolute measurement

Shengtong Wang; Lvye Gao; Linbin Luo; Fuyuan Deng; Rui Ma; Xiaohao Wang; Xinghui Li

doi:10.1117/12.2686019

27 November 2023 Codes coupling optimization for absolute measurement

Shengtong Wang, Lvye Gao, Linbin Luo, Fuyuan Deng, Rui Ma, Xiaohao Wang, Xinghui Li

Proceedings Volume 12769, Optical Metrology and Inspection for Industrial Applications X; 1276910 (2023) https://doi.org/10.1117/12.2686019
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

Absolute measurement has always been one of the important development directions of precision measurement, there are problems that the diffraction and mask working parameters are not considered in the positioning pulse analysis of the absolute code mask at present. Therefore, in order to solve the coupling optimal performance problem of absolute positioning code in actual work, an absolute code should be designed for working in the best parameter-model. In this paper, a multi-parameter model of absolute code working status is established, and the influence of working parameters on its positioning performance is analyzed respectively. The analysis shows that the distance and the angle between the mask and the grating, and the width of the unit code will affect the positioning accuracy. The three parameters restrict each other, and there is a coupling optimal solution. The optimal working state can be obtained through parameter analysis, so as to provide the design and installation parameter guidance of mask. The proposed research can help the practical application of absolute positioning measurement.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Shengtong Wang, Lvye Gao, Linbin Luo, Fuyuan Deng, Rui Ma, Xiaohao Wang, and Xinghui Li "Codes coupling optimization for absolute measurement", Proc. SPIE 12769, Optical Metrology and Inspection for Industrial Applications X, 1276910 (27 November 2023); https://doi.org/10.1117/12.2686019

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Design and modelling

Pulse signals

Analytical research

Binary data

Diffraction

Opacity

Performance modeling

Show All Keywords

Keywords/Phrases

Search In:

Publication Years