A laser confocal vibration signal processing method based on wavelet transform

Demin Xu; Yuebo Wu; Lirong Qiu; Ke-Mi Xu; Weiqian Zhao

doi:10.1117/12.2686959

29 November 2023 A laser confocal vibration signal processing method based on wavelet transform

Demin Xu, Yuebo Wu, Lirong Qiu, Ke-Mi Xu, Weiqian Zhao

Proceedings Volume 12769, Optical Metrology and Inspection for Industrial Applications X; 1276919 (2023) https://doi.org/10.1117/12.2686959
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Conference Poster

Abstract

In order to solve the problem that the laser confocal vibration measurement method is susceptible to noise and interference signals. This paper proposes a laser confocal vibration signal processing method based on wavelet denoising. By using wavelet transform to denoise the laser confocal vibration signal, this method effectively eliminates noise and interference signals. The experiment shows that the use of wavelet transform can effectively improve the test results of laser confocal vibration measurement, achieving a measurement bandwidth of 100MHz and a nanometer-level amplitude resolution. This method provides ideas for expanding the application of the laser confocal vibration measurement in complex scenes.

Citation Download Citation

Demin Xu, Yuebo Wu, Lirong Qiu, Ke-Mi Xu, and Weiqian Zhao "A laser confocal vibration signal processing method based on wavelet transform", Proc. SPIE 12769, Optical Metrology and Inspection for Industrial Applications X, 1276919 (29 November 2023); https://doi.org/10.1117/12.2686959

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