Titanium and silicon oxides for infrared AR coating design

M. M. Zinovev; N. N. Yudin; S. N. Podzyvalov; E. S. Slyunko; V. S. Kuznetsov; O. A. Romanovsky

doi:10.1117/12.3004278

17 October 2023 Titanium and silicon oxides for infrared AR coating design

M. M. Zinovev, N. N. Yudin, S. N. Podzyvalov, E. S. Slyunko, V. S. Kuznetsov, O. A. Romanovsky

Proceedings Volume 12780, 29th International Symposium on Atmospheric and Ocean Optics: Atmospheric Physics; 127803U (2023) https://doi.org/10.1117/12.3004278
Event: XXIX International Symposium "Atmospheric and Ocean Optics, Atmospheric Physics", 2023, Moscow, Russian Federation

Abstract

A multilayer antireflection coating based on titanium oxide and silicon oxide has been developed. The dispersions of the refractive index and absorption coefficient of these materials are obtained in a wide spectral region of 500-8000 nm. Taking into account these dispersions, a calculation was made of a four-layer interference coating with ZGP substrate antireflection in the range of 2097 nm and 3500-5000 nm, with residual reflection R≤0.2% and R≤2.1%, respectively. The modes of coating deposition by the method of ion-beam sputtering on the substrate are selected.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

M. M. Zinovev, N. N. Yudin, S. N. Podzyvalov, E. S. Slyunko, V. S. Kuznetsov, and O. A. Romanovsky "Titanium and silicon oxides for infrared AR coating design", Proc. SPIE 12780, 29th International Symposium on Atmospheric and Ocean Optics: Atmospheric Physics, 127803U (17 October 2023); https://doi.org/10.1117/12.3004278

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