Simple analytic model including shielding by the plume during excimer laser ablation of polyimide

Klaus Schildbach

doi:10.1117/12.20621

1 August 1990 Simple analytic model including shielding by the plume during excimer laser ablation of polyimide

Klaus Schildbach

Proceedings Volume 1279, Laser-Assisted Processing II; (1990) https://doi.org/10.1117/12.20621
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

For a quantitative description of the ablation of polyimide by excimer laser pulses in the nanosecond range, the concept of a moving surface during the pulse and of the shielding of its trailing edge by the plume is very essential. In a recent publication by Mahan et al.(1989) the concept of a moving interface was solved analytically. The main purpose of this paper is to include here the shielding effect. It will be shown that the resulting analytical formula describes most experimental data with surprising accuracy.

Citation Download Citation

Klaus Schildbach "Simple analytic model including shielding by the plume during excimer laser ablation of polyimide", Proc. SPIE 1279, Laser-Assisted Processing II, (1 August 1990); https://doi.org/10.1117/12.20621

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