Surface patterning by pulsed-laser-induced transfer of metals and compounds

Zsolt Toth; Peter Mogyorosi; Tamas Szoerenyi

doi:10.1117/12.20631

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1 August 1990 Surface patterning by pulsed-laser-induced transfer of metals and compounds

Zsolt Toth, Peter Mogyorosi, Tamas Szoerenyi

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Proceedings Volume 1279, Laser-Assisted Processing II; (1990) https://doi.org/10.1117/12.20631
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

Besults of a systematic study on Q-switched nthy laser induced rrrn2 area transfer of supported titanium and chranium thin films and Ge/Se multilayer structures are reported. The appearance of the prints is governed by film-support adhesion and source-target spacing. Best quality prints are produced by ablating well adhering ntal films in close proximity ( spacing < 15 pm) to the target to be patterned. Transfer fran stacked elenntaxy layers as a source offers a unique possibility of depositing acinpound films by mixing the constituents and transferring the material onto the target substrate in a single step.

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Zsolt Toth, Peter Mogyorosi, and Tamas Szoerenyi "Surface patterning by pulsed-laser-induced transfer of metals and compounds", Proc. SPIE 1279, Laser-Assisted Processing II, (1 August 1990); https://doi.org/10.1117/12.20631

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